Inventor

MANE ANIL

US4 patents

⚠️ This page may combine multiple inventors who share the name “MANE ANIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHANDRASHEKAR ANAND

2 patents

US8058170B2Nov 15, 2011

Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics

CHANDRASHEKAR ANAND83 citations95

US8409987B2Apr 2, 2013

Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics

CHANDRASHEKAR ANAND34 citations91

KLA TENCOR CORP

1 patent

US10072334B2Sep 11, 2018

Digital pattern generator having charge drain coating

KLA TENCOR CORP0 citations50

TONG WILLIAM M

1 patent

US9824851B2Nov 21, 2017

Charge drain coating for electron-optical MEMS

TONG WILLIAM M1 citations47