Inventor
DOWNES JAMES ROBERT
NL7 patents
Patents
7 patentsUS10078272B2Sep 18, 2018
Lithographic method and apparatus
ASML NETHERLANDS BV2 citations70
US11022895B2Jun 1, 2021
Lithographic apparatus adjustment method
ASML NETHERLANDS BV0 citations54
US11126091B2Sep 21, 2021
Measurement apparatus and method for predicting aberrations in a projection system
ASML NETHERLANDS BV0 citations51
US10948832B2Mar 16, 2021
Lithographic method and apparatus
ASML NETHERLANDS BV1 citations50
US11237490B2Feb 1, 2022
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations44
US11036144B2Jun 15, 2021
Lithographic method and apparatus
ASML NETHERLANDS BV0 citations36
US10620548B2Apr 14, 2020
Lithographic method and apparatus
ASML NETHERLANDS BV0 citations30