Inventor
SHIBUSAWA YUKINOBU
JP5 patents
Patents
5 patentsUS11437244B2Sep 6, 2022
Dry etching gas composition and dry etching method
KANTO DENKA KOGYO KK0 citations59
US11046629B2Jun 29, 2021
Method of producing compound having butadiene skeleton containing hydrogen and fluorine and/or chlorine
KANTO DENKA KOGYO KK1 citations56
US10899615B2Jan 26, 2021
Feeding process of chlorine fluoride
KANTO DENKA KOGYO KK1 citations56
US10982811B2Apr 20, 2021
Material, storage container using the material, valve attached to the storage container, method of storing ClF and method of using ClF storage container
KANTO DENKA KOGYO KK1 citations55
US11878915B2Jan 23, 2024
Production method and production apparatus for molybdenum hexafluoride
KANTO DENKA KOGYO KK0 citations54