Inventor
MATSUNAGA MASATAKA
JP9 patents
⚠️ This page may combine multiple inventors who share the name “MATSUNAGA MASATAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS6814809B2Nov 9, 2004
Coating and developing apparatus and pattern forming method
TOKYO ELECTRON LTD16 citations82
US10840213B2Nov 17, 2020
Bonding system
TOKYO ELECTRON LTD7 citations78
US10340248B2Jul 2, 2019
Bonding systems
TOKYO ELECTRON LTD4 citations71
US10424502B2Sep 24, 2019
Substrate transfer device and bonding system
TOKYO ELECTRON LTD4 citations69
US12538720B2Jan 27, 2026
Bonding system
TOKYO ELECTRON LTD0 citations47
US9607869B2Mar 28, 2017
Bonding system
TOKYO ELECTRON LTD0 citations40