Inventor
NISHINO Mineyuki
JP4 patents
Patents
4 patentsUS9720332B2Aug 1, 2017
Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium
NIKON CORP4 citations82
US10942457B2Mar 9, 2021
Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium
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US10642159B2May 5, 2020
Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium
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US11360394B2Jun 14, 2022
Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium
NIKON CORP0 citations60