Inventor
AGOSTINO PETER A
US7 patents
Patents
7 patentsUS5135595AAug 4, 1992
Process for fabricating a low dielectric composite substrate
IBM24 citations91
US5277725AJan 11, 1994
Process for fabricating a low dielectric composite substrate
IBM17 citations81
US4735820AApr 5, 1988
Removal of residual catalyst from a dielectric substrate
IBM10 citations72
US5370974ADec 6, 1994
Laser exposure of photosensitive polyimide for pattern formation
IBM11 citations68
US5270151ADec 14, 1993
Spin on oxygen reactive ion etch barrier
IBM6 citations62
US5262273ANov 16, 1993
Photosensitive reactive ion etch barrier
IBM5 citations57
US5215861AJun 1, 1993
Thermographic reversible photoresist
IBM5 citations53