Inventor
RYLE LYNN S
US6 patents
⚠️ This page may combine multiple inventors who share the name “RYLE LYNN S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ONTRAK SYSTEMS INC
5 patentsUS5861066AJan 19, 1999
Method and apparatus for cleaning edges of contaminated substrates
ONTRAK SYSTEMS INC88 citations95
US5762084AJun 9, 1998
Megasonic bath
ONTRAK SYSTEMS INC46 citations92
US5745946AMay 5, 1998
Substrate processing system
ONTRAK SYSTEMS INC68 citations92
US5727332AMar 17, 1998
Contamination control in substrate processing system
ONTRAK SYSTEMS INC44 citations91
US5606251AFeb 25, 1997
Method and apparatus for detecting a substrate in a substrate processing system
ONTRAK SYSTEMS INC24 citations89