Inventor · disambiguated record
Su-Ying Su
Also filed as: SU SU-YING
2 granted patents·49 citations·filing 1998–1999
63Inventor score
Files withTAIWAN SEMICONDUCTOR MFG2
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2 records- 0166US6040223AMethod for making improved polysilicon FET gate electrodes having composite sidewall spacers using a trapezoidal-shaped insulating layer for more reliable integrated circuitsTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Mar 21, 2000·41 cites·20 claims
- 0238US6063709ARemoval of SOG etchback residue by argon treatmentTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted May 16, 2000·8 cites·15 claims
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