Inventor

WEIHING ROBERT

DE3 patents

⚠️ This page may combine multiple inventors who share the name “WEIHING ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STEAG HAMATECH AG

2 patents

US6512207B1Jan 28, 2003

Apparatus and method for the treatment of substrates

STEAG HAMATECH AG40 citations89

US7842905B2Nov 30, 2010

Method and device for the thermal treatment of substrates

STEAG HAMATECH AG5 citations57

STEAG HAMA TECH AG

1 patent

US6858088B1Feb 22, 2005

Method and apparatus for treating substrates

STEAG HAMA TECH AG7 citations69