Inventor
ITAGAKI YOHSUKE
JP4 patents
⚠️ This page may combine multiple inventors who share the name “ITAGAKI YOHSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FAB SOLUTIONS INC
2 patentsUS6943043B2Sep 13, 2005
Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device
FAB SOLUTIONS INC8 citations72
US6753194B2Jun 22, 2004
Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device
FAB SOLUTIONS INC5 citations72