Inventor

SAI KYOKUYO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SAI KYOKUYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAI KYOKUYO

2 patents

US8922790B2Dec 30, 2014

Optical film thickness measuring device and thin film forming apparatus using the optical film thickness measuring device

SAI KYOKUYO2 citations55

US8625111B2Jan 7, 2014

Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter

SAI KYOKUYO1 citations37

HINATA YOHEI

1 patent

US10415135B2Sep 17, 2019

Thin film formation method and thin film formation apparatus

HINATA YOHEI0 citations25