Inventor

CHIU CHIN-HUEI

TW2 patents

Patents

2 patents

US11049756B2Jun 29, 2021

Thermal pad for etch rate uniformity

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58

US10199252B2Feb 5, 2019

Thermal pad for etch rate uniformity

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58