Inventor
CHANG TUNG-JUNG
TW7 patents
⚠️ This page may combine multiple inventors who share the name “CHANG TUNG-JUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
6 patentsUS11592754B2Feb 28, 2023
Advanced load port for photolithography mask inspection tool
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10627728B2Apr 21, 2020
Method for creating vacuum in load lock chamber
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12298664B2May 13, 2025
Advanced load port for photolithography mask inspection tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11921431B2Mar 5, 2024
Advanced load port for photolithography mask inspection tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11054756B2Jul 6, 2021
Apparatus and method for cleaning reticle stage
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US10684559B2Jun 16, 2020
Apparatus and method for cleaning reticle stage
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50