Inventor
ZHOU CHUNMING
US8 patents
⚠️ This page may combine multiple inventors who share the name “ZHOU CHUNMING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS11572618B2Feb 7, 2023
Method and chamber for backside physical vapor deposition
APPLIED MATERIALS INC2 citations71
US11469096B2Oct 11, 2022
Method and chamber for backside physical vapor deposition
APPLIED MATERIALS INC2 citations70
US12176205B2Dec 24, 2024
Method and chamber for backside physical vapor deposition
APPLIED MATERIALS INC0 citations59
US12142478B2Nov 12, 2024
Method and chamber for backside physical vapor deposition
APPLIED MATERIALS INC0 citations59
US12094773B2Sep 17, 2024
Methods for low resistivity and stress tungsten gap fill
APPLIED MATERIALS INC0 citations57
US11798845B2Oct 24, 2023
Methods and apparatus for low resistivity and stress tungsten gap fill
APPLIED MATERIALS INC0 citations57
US12191198B2Jan 7, 2025
Low resistivity tungsten film and method of manufacture
APPLIED MATERIALS INC0 citations48