Inventor
MORAES KEVIN VINCENT
US4 patents
Patents
4 patentsUS11469096B2Oct 11, 2022
Method and chamber for backside physical vapor deposition
APPLIED MATERIALS INC2 citations70
US12176205B2Dec 24, 2024
Method and chamber for backside physical vapor deposition
APPLIED MATERIALS INC0 citations59
US12142478B2Nov 12, 2024
Method and chamber for backside physical vapor deposition
APPLIED MATERIALS INC0 citations59
US11414740B2Aug 16, 2022
Processing system for forming layers
APPLIED MATERIALS INC0 citations47