Inventor
MIYAHARA NORIYUKI
JP5 patents
Patents
5 patentsUS4744642AMay 17, 1988
Microscope
OLYMPUS OPTICAL CO130 citations95
US4832474AMay 23, 1989
Microscope apparatus for examining wafer
OLYMPUS OPTICAL CO24 citations92
US4732485AMar 22, 1988
Optical surface profile measuring device
OLYMPUS OPTICAL CO29 citations91
US4734570AMar 29, 1988
Active focus detecting device with infrared source
OLYMPUS OPTICAL CO10 citations72
US4769530ASep 6, 1988
Focusing degree-detecting device with a reduction optical system
OLYMPUS OPTICAL CO16 citations71