Inventor

KAKIZAKI SATOSHI

JP2 patents

Patents

2 patents

US5387265AFeb 7, 1995

Semiconductor wafer reaction furnace with wafer transfer means

KOKUSAI ELECTRIC CO LTD408 citations97

US5902103AMay 11, 1999

Vertical furnace of a semiconductor manufacturing apparatus and a boat cover thereof

KOKUSAI ELECTRIC CO LTD26 citations89