Inventor

HARRISON BERNARD FRANCIS

GB3 patents

Patents

3 patents

US5886355AMar 23, 1999

Ion implantation apparatus having increased source lifetime

APPLIED MATERIALS INC101 citations95

US6559454B1May 6, 2003

Ion beam generation apparatus

APPLIED MATERIALS INC66 citations91

US6608316B1Aug 19, 2003

Ion implantation beam monitor

APPLIED MATERIALS INC33 citations89