Inventor
POVALL SIMON
GB4 patents
Patents
4 patentsUS6559454B1May 6, 2003
Ion beam generation apparatus
APPLIED MATERIALS INC66 citations91
US5920076AJul 6, 1999
Ion beam apparatus
APPLIED MATERIALS INC77 citations90
US6897457B1May 24, 2005
Apparatus and method for monitoring and tuning an ion beam in ion implantation apparatus
APPLIED MATERIALS INC14 citations79
US7004234B2Feb 28, 2006
Vaporizer for generating feed gas for an arc chamber
APPLIED MATERIALS INC4 citations60