Inventor
LU JEAN QING
US4 patents
Patents
4 patentsUS6613199B1Sep 2, 2003
Apparatus and method for physical vapor deposition using an open top hollow cathode magnetron
NOVELLUS SYSTEMS INC35 citations91
US6589398B1Jul 8, 2003
Pasting method for eliminating flaking during nitride sputtering
NOVELLUS SYSTEMS INC26 citations83
US6471831B2Oct 29, 2002
Apparatus and method for improving film uniformity in a physical vapor deposition system
NOVELLUS SYSTEMS INC14 citations79
US6468404B2Oct 22, 2002
Apparatus and method for reducing redeposition in a physical vapor deposition system
NOVELLUS SYSTEMS INC12 citations71