Inventor

ZAPILKO CLEMENS

DE5 patents

⚠️ This page may combine multiple inventors who share the name “ZAPILKO CLEMENS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCHWAB GUENTER

2 patents

US8070882B2Dec 6, 2011

Method for the wet-chemical treatment of a semiconductor wafer

SCHWAB GUENTER8 citations79

US9230794B2Jan 5, 2016

Process for cleaning, drying and hydrophilizing a semiconductor wafer

SCHWAB GUENTER0 citations36

ZAPILKO CLEMENS

2 patents

USRE44986EJul 1, 2014

Method for polishing a semiconductor wafer

ZAPILKO CLEMENS0 citations43

US8157617B2Apr 17, 2012

Method for polishing a semiconductor wafer

ZAPILKO CLEMENS0 citations43

SILTRONIC AG

1 patent

US7938911B2May 10, 2011

Process for cleaning a semiconductor wafer using a cleaning solution

SILTRONIC AG8 citations81