Inventor
GROOTEGOED JAMES
US8 patents
Patents
8 patentsUS9718082B2Aug 1, 2017
Inline dispense capacitor
TOKYO ELECTRON LTD12 citations82
US10403501B2Sep 3, 2019
High-purity dispense system
TOKYO ELECTRON LTD3 citations71
US9987655B2Jun 5, 2018
Inline dispense capacitor system
TOKYO ELECTRON LTD3 citations71
US10712663B2Jul 14, 2020
High-purity dispense unit
TOKYO ELECTRON LTD1 citations60
US8048226B2Nov 1, 2011
Method and system for improving deposition uniformity in a vapor deposition system
TOKYO ELECTRON LTD2 citations60
US12506019B2Dec 23, 2025
Wafer chuck designs and methods for retaining a processing liquid on a surface of a semiconductor wafer
TOKYO ELECTRON LTD0 citations47
US11383211B2Jul 12, 2022
Point-of-use dynamic concentration delivery system with high flow and high uniformity
TOKYO ELECTRON LTD0 citations47
US10354872B2Jul 16, 2019
High-precision dispense system with meniscus control
TOKYO ELECTRON LTD0 citations39