Inventor

PENG YU-YUN

TW71 patents

⚠️ This page may combine multiple inventors who share the name “PENG YU-YUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

45 patents

US9754818B2Sep 5, 2017

Via patterning using multiple photo multiple etch

TAIWAN SEMICONDUCTOR MFG CO LTD472 citations98

US10950731B1Mar 16, 2021

Inner spacers for gate-all-around semiconductor devices

TAIWAN SEMICONDUCTOR MFG CO LTD25 citations94

US9659811B1May 23, 2017

Manufacturing method of semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD19 citations92

US9412648B1Aug 9, 2016

Via patterning using multiple photo multiple etch

TAIWAN SEMICONDUCTOR MFG CO LTD13 citations92

US11158539B2Oct 26, 2021

Method and structure for barrier-less plug

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84

US10535512B2Jan 14, 2020

Formation method of semiconductor device with gate spacer

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83

US11855214B2Dec 26, 2023

Inner spacers for gate-all-around semiconductor devices

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73

US11373866B2Jun 28, 2022

Dielectric material and methods of forming same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73

US11227794B2Jan 18, 2022

Method for making self-aligned barrier for metal vias In-Situ during a metal halide pre-clean and associated interconnect structure

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73

US10971391B2Apr 6, 2021

Dielectric gap fill

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73

US10879111B1Dec 29, 2020

Dielectric plugs

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73

US10510895B2Dec 17, 2019

Device and method of dielectric layer

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73

US10510584B2Dec 17, 2019

Via patterning using multiple photo multiple etch

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73

US10340178B2Jul 2, 2019

Via patterning using multiple photo multiple etch

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73

US11393677B2Jul 19, 2022

Semiconductor device structure with gate spacer

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72

US10867785B2Dec 15, 2020

Structure and formation method of semiconductor device with gate spacer

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72

US11942358B2Mar 26, 2024

Low thermal budget dielectric for semiconductor devices

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71

US10669625B2Jun 2, 2020

Pumping liner for chemical vapor deposition

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71

US10991636B2Apr 27, 2021

Semiconductor device and method

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations68

US10957585B2Mar 23, 2021

Semiconductor device and method of forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations65

US12034075B2Jul 9, 2024

Device of dielectric layer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US11996363B2May 28, 2024

Interconnect structure including a heat dissipation layer and methods of forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US11935752B2Mar 19, 2024

Device of dielectric layer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US11018258B2May 25, 2021

Device of dielectric layer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US10957543B2Mar 23, 2021

Device and method of dielectric layer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US12512317B2Dec 30, 2025

Dielectric material and methods of forming same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12341013B2Jun 24, 2025

Method and structure for barrier-less plug

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12336214B2Jun 17, 2025

Inner spacers for gate-all-around semiconductor devices

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12315837B2May 27, 2025

Storage layers for wafer bonding

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12255239B2Mar 18, 2025

Liner layer for backside contacts of semiconductor devices

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12255249B2Mar 18, 2025

Inner spacer structures for gate-all-around field effect transistors

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12051592B2Jul 30, 2024

Method and structure for barrier-less plug

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11972974B2Apr 30, 2024

Self-aligned barrier for metal vias

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11908921B2Feb 20, 2024

Transistor isolation structures

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11817343B2Nov 14, 2023

Dielectric gap fill

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62

US11804539B2Oct 31, 2023

Transistor isolation structures

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11488869B2Nov 1, 2022

Transistor isolation structures

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11282712B2Mar 22, 2022

Method for preventing bottom layer wrinkling in a semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US10141220B2Nov 27, 2018

Via patterning using multiple photo multiple etch

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62

US12550720B2Feb 10, 2026

Semiconductor structure and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61

US12308312B2May 20, 2025

Interconnect structure and method for manufacturing the interconnect structure

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61

US11854796B2Dec 26, 2023

Semiconductor device structure with gate spacer

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61

US11637062B2Apr 25, 2023

Interconnect structure and method for manufacturing the interconnect structure

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61

US11257753B2Feb 22, 2022

Interconnect structure and method for manufacturing the interconnect structure

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61

US12575123B2Mar 10, 2026

Semiconductor device and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60

TAIWAN SEMICONDUCTOR MFG

2 patents

US9257331B2Feb 9, 2016

Method of making interconnect structure

TAIWAN SEMICONDUCTOR MFG1 citations63

US9177918B2Nov 3, 2015

Apparatus and methods for low k dielectric layers

TAIWAN SEMICONDUCTOR MFG2 citations62

LIOU JOUNG-WEI

1 patent

US9054110B2Jun 9, 2015

Low-K dielectric layer and porogen

LIOU JOUNG-WEI5 citations82

PENG YU-YUN

1 patent

US8889567B2Nov 18, 2014

Apparatus and methods for low K dielectric layers

PENG YU-YUN4 citations68

TAIWAN SEMICONDUCTOR MFG COMPANY LTD

1 patent

US12599042B2Apr 7, 2026

Carrier structure and methods of forming the same

TAIWAN SEMICONDUCTOR MFG COMPANY LTD0 citations61

Showing the top 50 of 71 patents by PatentIndex Score.