Inventor

VAN SCHIJNDEL ANTONIUS HUBERTUS

NL3 patents

⚠️ This page may combine multiple inventors who share the name “VAN SCHIJNDEL ANTONIUS HUBERTUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US10241418B2Mar 26, 2019

Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus

ASML NETHERLANDS BV9 citations80

US10613445B2Apr 7, 2020

Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process

ASML NETHERLANDS BV3 citations69

BLOM PAULUS PETRUS MARIA

1 patent

US9161427B2Oct 13, 2015

Device and method for generating a plasma discharge for patterning the surface of a substrate

BLOM PAULUS PETRUS MARIA0 citations30