Inventor
YOUNG DONNY
US18 patents
⚠️ This page may combine multiple inventors who share the name “YOUNG DONNY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS7674360B2Mar 9, 2010
Mechanism for varying the spacing between sputter magnetron and target
APPLIED MATERIALS INC12 citations82
US7561015B2Jul 14, 2009
Magnet secured in a two part shell
APPLIED MATERIALS INC10 citations82
US10763090B2Sep 1, 2020
High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process
APPLIED MATERIALS INC3 citations73
US9534286B2Jan 3, 2017
PVD target for self-centering process shield
APPLIED MATERIALS INC4 citations72
US9343274B2May 17, 2016
Process kit shield for plasma enhanced processing chamber
APPLIED MATERIALS INC2 citations61
US6875927B2Apr 5, 2005
High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications
APPLIED MATERIALS INC4 citations60
US9404174B2Aug 2, 2016
Pinned target design for RF capacitive coupled plasma
APPLIED MATERIALS INC0 citations41
YOUNG DONNY
5 patentsUS8790499B2Jul 29, 2014
Process kit components for titanium sputtering chamber
YOUNG DONNY9 citations79
US8668815B2Mar 11, 2014
Process kit for RF physical vapor deposition
YOUNG DONNY4 citations71
US9123511B2Sep 1, 2015
Process kit for RF physical vapor deposition
YOUNG DONNY3 citations61
US9303311B2Apr 5, 2016
Substrate processing system with mechanically floating target assembly
YOUNG DONNY1 citations50
US9255322B2Feb 9, 2016
Substrate processing system having symmetric RF distribution and return paths
YOUNG DONNY0 citations40