Inventor
AGGARWAL RAVINDER
US33 patents
⚠️ This page may combine multiple inventors who share the name “AGGARWAL RAVINDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
21 patentsUS6899145B2May 31, 2005
Front opening unified pod
ASM INC87 citations98
US7725012B2May 25, 2010
Movable radiant heat sources
ASM INC391 citations97
US6042324AMar 28, 2000
Multi-stage single-drive FOUP door system
ASM INC91 citations97
US6696367B1Feb 24, 2004
System for the improved handling of wafers within a process tool
ASM INC452 citations96
US6242718B1Jun 5, 2001
Wafer holder
ASM INC62 citations95
US7018504B1Mar 28, 2006
Loadlock with integrated pre-clean chamber
ASM INC22 citations90
US6883776B2Apr 26, 2005
Slit valve for a semiconductor processing system
ASM INC19 citations90
US7648579B2Jan 19, 2010
Substrate support system for reduced autodoping and backside deposition
ASM INC42 citations89
US6161311ADec 19, 2000
System and method for reducing particles in epitaxial reactors
ASM INC33 citations88
US8047706B2Nov 1, 2011
Calibration of temperature control system for semiconductor processing chamber
ASM INC18 citations83
US6879777B2Apr 12, 2005
Localized heating of substrates using optics
ASM INC16 citations83
US7159846B2Jan 9, 2007
Slit valve for a semiconductor processing system
ASM INC10 citations81
US7147720B2Dec 12, 2006
Non-contact cool-down station for wafers
ASM INC6 citations73
US6883250B1Apr 26, 2005
Non-contact cool-down station for wafers
ASM INC6 citations73
US6704496B2Mar 9, 2004
High temperature drop-off of a substrate
ASM INC8 citations73
US6521503B2Feb 18, 2003
High temperature drop-off of a substrate
ASM INC9 citations73
US6162006ADec 19, 2000
Stackable cassette for use with wafer cassettes
ASM INC12 citations73
US6550158B2Apr 22, 2003
Substrate handling chamber
ASM INC5 citations69
US7231141B2Jun 12, 2007
High temperature drop-off of a substrate
ASM INC6 citations62
US7585142B2Sep 8, 2009
Substrate handling chamber with movable substrate carrier loading platform
ASM INC5 citations61
US7993057B2Aug 9, 2011
Redundant temperature sensor for semiconductor processing chambers
ASM INC6 citations60
AGGARWAL RAVINDER
7 patentsUSD600223SSep 15, 2009
Susceptor ring
AGGARWAL RAVINDER483 citations97
US8486191B2Jul 16, 2013
Substrate reactor with adjustable injectors for mixing gases within reaction chamber
AGGARWAL RAVINDER25 citations91
US8067061B2Nov 29, 2011
Reaction apparatus having multiple adjustable exhaust ports
AGGARWAL RAVINDER16 citations91
US8801857B2Aug 12, 2014
Self-centering susceptor ring assembly
AGGARWAL RAVINDER12 citations83
US8394229B2Mar 12, 2013
Susceptor ring
AGGARWAL RAVINDER13 citations82
US8440048B2May 14, 2013
Load lock having secondary isolation chamber
AGGARWAL RAVINDER10 citations79
US9551069B2Jan 24, 2017
Reaction apparatus having multiple adjustable exhaust ports
AGGARWAL RAVINDER0 citations50