Inventor
HARO ROBERT C
US8 patents
⚠️ This page may combine multiple inventors who share the name “HARO ROBERT C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
6 patentsUS9267850B2Feb 23, 2016
Thermocouple assembly with guarded thermocouple junction
ASM INC467 citations98
US8382370B2Feb 26, 2013
Thermocouple assembly with guarded thermocouple junction
ASM INC345 citations98
US6704496B2Mar 9, 2004
High temperature drop-off of a substrate
ASM INC8 citations73
US6521503B2Feb 18, 2003
High temperature drop-off of a substrate
ASM INC9 citations73
US7231141B2Jun 12, 2007
High temperature drop-off of a substrate
ASM INC6 citations62
US7597574B2Oct 6, 2009
Lamp fasteners for semiconductor processing reactors
ASM INC0 citations41