Inventor
WEBB AARON P
US10 patents
⚠️ This page may combine multiple inventors who share the name “WEBB AARON P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
6 patentsUS9694989B2Jul 4, 2017
Workpiece handling system and methods of workpiece handling
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations71
US9490153B2Nov 8, 2016
Mechanical alignment of substrates to a mask
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC6 citations67
US9659677B2May 23, 2017
Shielding device for substrate edge protection and method of using same
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51
US9570309B2Feb 14, 2017
Mask alignment system for semiconductor processing
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations47
US10217657B2Feb 26, 2019
Active substrate alignment system and method
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations46
US10446710B2Oct 15, 2019
Transfer chamber and method of using a transfer chamber
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations40