Inventor
OIKAWA JUNJI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “OIKAWA JUNJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
YAMAWAKU JUN
3 patentsUS9385015B2Jul 5, 2016
Transfer chamber and method for preventing adhesion of particle
YAMAWAKU JUN6 citations82
US8398745B2Mar 19, 2013
Substrate processing apparatus and exhaust method therefor
YAMAWAKU JUN4 citations60
US8409328B2Apr 2, 2013
Substrate transfer device and substrate transfer method
YAMAWAKU JUN1 citations50