Inventor
IHORI ATSUHITO
JP5 patents
Patents
5 patentsUS11111577B2Sep 7, 2021
Film-forming apparatus and film-forming method
ULVAC INC0 citations44
US10429964B2Oct 1, 2019
Touch panel, method of manufacturing touch panel, and optical thin film
ULVAC INC0 citations37
US9891731B2Feb 13, 2018
Touch panel, method of producing the same, optical thin film substrate and method of producing the same
ULVAC INC0 citations37
US10490390B2Nov 26, 2019
Substrate processing device
ULVAC INC0 citations36
US10370757B2Aug 6, 2019
Thin substrate processing device
ULVAC INC0 citations33