Inventor

IWAI HARUNORI

JP3 patents

Patents

3 patents

US11111577B2Sep 7, 2021

Film-forming apparatus and film-forming method

ULVAC INC0 citations44

US10490390B2Nov 26, 2019

Substrate processing device

ULVAC INC0 citations36

US10370757B2Aug 6, 2019

Thin substrate processing device

ULVAC INC0 citations33