Inventor
SHINOHARA MASATO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “SHINOHARA MASATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOYO TANSO CO
5 patentsUS10522386B2Dec 31, 2019
Susceptor and method for manufacturing same
TOYO TANSO CO3 citations71
US11261539B2Mar 1, 2022
Method for manufacturing reformed sic wafer, epitaxial layer-attached sic wafer, method for manufacturing same, and surface treatment method
TOYO TANSO CO0 citations59
US10388536B2Aug 20, 2019
Etching method for SiC substrate and holding container
TOYO TANSO CO1 citations59
US10665485B2May 26, 2020
Heat treatment vessel for single-crystal silicon carbide substrate and etching method
TOYO TANSO CO0 citations49
US9764992B2Sep 19, 2017
Silicon carbide-tantalum carbide composite and susceptor
TOYO TANSO CO0 citations46