Inventor

SLEVIN DAMIEN MARTIN

US3 patents

Patents

3 patents

US12322641B2Jun 3, 2025

Mechanical indexer for multi-station process module

LAM RES CORP0 citations58

US10944374B2Mar 9, 2021

Electrostatic chuck filter box and mounting bracket

LAM RES CORP0 citations53

US10693433B2Jun 23, 2020

Electrostatic chuck filter box and mounting bracket

LAM RES CORP1 citations53