Inventor
KOELMEL BLAKE R
US12 patents
⚠️ This page may combine multiple inventors who share the name “KOELMEL BLAKE R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS9390950B2Jul 12, 2016
Rapid thermal processing chamber with micro-positioning system
APPLIED MATERIALS INC15 citations92
US9564349B2Feb 7, 2017
Rapid thermal processing chamber with micro-positioning system
APPLIED MATERIALS INC4 citations84
US8900889B2Dec 2, 2014
Rapid thermal processing chamber with micro-positioning system
APPLIED MATERIALS INC10 citations84
US8367983B2Feb 5, 2013
Apparatus including heating source reflective filter for pyrometry
APPLIED MATERIALS INC14 citations84
US9552989B2Jan 24, 2017
Apparatus and method for improved control of heating and cooling of substrates
APPLIED MATERIALS INC4 citations72
KOELMEL BLAKE R
3 patentsUS8548311B2Oct 1, 2013
Apparatus and method for improved control of heating and cooling of substrates
KOELMEL BLAKE R11 citations82
US9449858B2Sep 20, 2016
Transparent reflector plate for rapid thermal processing chamber
KOELMEL BLAKE R4 citations71
US8461022B2Jun 11, 2013
Methods and apparatus for aligning a substrate in a process chamber
KOELMEL BLAKE R2 citations59