Inventor
THEOFANIS PATRICK
US6 patents
Patents
6 patentsUS12266720B2Apr 1, 2025
Transistors with monocrystalline metal chalcogenide channel materials
INTEL CORP0 citations61
US10991696B2Apr 27, 2021
Vertically stacked devices with self-aligned regions formed by direct self assembly (DSA) processing
INTEL CORP0 citations61
US11262654B2Mar 1, 2022
Chain scission resist compositions for EUV lithography applications
INTEL CORP0 citations59
US11011537B2May 18, 2021
Vertical interconnect methods for stacked device architectures using direct self assembly with high operational parallelization and improved scalability
INTEL CORP0 citations51
US9926193B2Mar 27, 2018
Magnetic nanomechanical devices for stiction compensation
INTEL CORP0 citations49
US11984317B2May 14, 2024
EUV patterning methods, structures, and materials
INTEL CORP0 citations47