Inventor
CHIHAYA HIROAKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “CHIHAYA HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS12170217B2Dec 17, 2024
Substrate processing apparatus and abnormality detection method
TOKYO ELECTRON LTD1 citations62
US11542592B2Jan 3, 2023
Film forming system and method for forming film on substrate
TOKYO ELECTRON LTD1 citations61
US11715671B2Aug 1, 2023
Film forming system, magnetization characteristic measuring device, and film forming method
TOKYO ELECTRON LTD0 citations60
US11939665B2Mar 26, 2024
Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method
TOKYO ELECTRON LTD1 citations59
US12469723B2Nov 11, 2025
Substrate processing apparatus and abnormality detection method
TOKYO ELECTRON LTD0 citations51
US12553845B2Feb 17, 2026
Holder temperature detection method, holder monitoring method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US12392026B2Aug 19, 2025
Method and device for substrate processing
TOKYO ELECTRON LTD0 citations47
US12387922B2Aug 12, 2025
Film forming apparatus, processing condition determination method, and film forming method
TOKYO ELECTRON LTD0 citations47
US10748750B2Aug 18, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations40