Inventor
MIKHNENKO OLEKSANDR
US3 patents
Patents
3 patentsUS12444570B2Oct 14, 2025
Electrostatic chuck heater resistance measurement to approximate temperature
LAM RES CORP0 citations56
US12500069B2Dec 16, 2025
Method of mounting wires to substrate support ceramic
LAM RES CORP0 citations52
US12142464B2Nov 12, 2024
In situ real-time sensing and compensation of non-uniformities in substrate processing systems
LAM RES CORP0 citations45