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Inventor
ISHIMARU KATSUAKI
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “ISHIMARU KATSUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
2 patents
US6137562A
Oct 24, 2000
Substrate adjuster, substrate holder and substrate holding method
NIKON CORP
82 citations
92
US6606145B2
Aug 12, 2003
Exposure apparatus, microdevice, photomask, and exposure method
NIKON CORP
18 citations
81
TOSOH CORP
1 patent
US5263008A
Nov 16, 1993
Magneto-optical disk device having a plurality of independently moving magneto-optical heads in the head window
TOSOH CORP
13 citations
69