Inventor

HIRAO SHUJI

JP9 patents

Patents

9 patents

US5753536AMay 19, 1998

Semiconductor device and associated fabrication method

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD310 citations98

US5693557ADec 2, 1997

Method of fabricating a semiconductor device

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD29 citations92

US5474949ADec 12, 1995

Method of fabricating capacitor or contact for semiconductor device by forming uneven oxide film and reacting silicon with metal containing gas

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD22 citations92

US5385867AJan 31, 1995

Method for forming a multi-layer metallic wiring structure

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD40 citations92

US5621247AApr 15, 1997

Memory device with tungsten and aluminum interconnects

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD33 citations90

US5661068AAug 26, 1997

Method of fabricating a semiconductor device

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD9 citations73

US5714400AFeb 3, 1998

Method for forming a memory device by utilizing variations in resistance value

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD15 citations71

US7001841B2Feb 21, 2006

Production method of semiconductor device

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD4 citations59

US7217353B2May 15, 2007

Method and apparatus for plating substrate

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD0 citations40