Inventor

TANTRA MULJADI

US3 patents

Patents

3 patents

US6028880AFeb 22, 2000

Automatic fluorine control system

CYMER INC227 citations96

US6687562B2Feb 3, 2004

Process monitoring system for lithography lasers

CYMER INC48 citations91

US7203562B2Apr 10, 2007

Process monitoring system for lithography lasers

CYMER INC4 citations57