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Inventor
VYNE ROBERT MICHAEL
US
4 patents
⚠️ This page may combine multiple inventors who share the name “VYNE ROBERT MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
2 patents
US9514927B2
Dec 6, 2016
Plasma pre-clean module and process
ASM IP HOLDING BV
467 citations
97
US9299557B2
Mar 29, 2016
Plasma pre-clean module and process
ASM IP HOLDING BV
472 citations
97
ASM INC
1 patent
US6126744A
Oct 3, 2000
Method and system for adjusting semiconductor processing equipment
ASM INC
423 citations
93
ATOMERA INC
1 patent
US12315722B2
May 27, 2025
Method for making a radio frequency silicon-on-insulator (RFSOI) wafer including a superlattice
ATOMERA INC
0 citations
50