Inventor
FRACH PETER
DE5 patents
⚠️ This page may combine multiple inventors who share the name “FRACH PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FRAUNHOFER GES FORSCHUNG
3 patentsUS6132563AOct 17, 2000
Reactive sputtering process
FRAUNHOFER GES FORSCHUNG33 citations89
US9994950B2Jun 12, 2018
Method for depositing a piezoelectric film containing AIN, and a piezoelectric film containing AIN
FRAUNHOFER GES FORSCHUNG0 citations38
US10407767B2Sep 10, 2019
Method for depositing a layer using a magnetron sputtering device
FRAUNHOFER GES FORSCHUNG0 citations28