Inventor
CHOU WEI-ZEN
TW9 patents
Patents
9 patentsUS6361911B1Mar 26, 2002
Using a dummy frame pattern to improve CD control of VSB E-beam exposure system and the proximity effect of laser beam exposure system and Gaussian E-beam exposure system
TAIWAN SEMICONDUCTOR MFG29 citations92
US6294295B1Sep 25, 2001
Variable transmittance phase shifter to compensate for side lobe problem on rim type attenuating phase shifting masks
TAIWAN SEMICONDUCTOR MFG26 citations92
US6872507B2Mar 29, 2005
Radiation correction method for electron beam lithography
TAIWAN SEMICONDUCTOR MFG30 citations91
US6190809B1Feb 20, 2001
Cost-effective method to fabricate a combined attenuated-alternating phase shift mask
TAIWAN SEMICONDUCTOR MFG24 citations91
US6428938B1Aug 6, 2002
Phase-shift mask for printing high-resolution images and a method of fabrication
TAIWAN SEMICONDUCTOR MFG17 citations84
US6277528B1Aug 21, 2001
Method to change transmittance of attenuated phase-shifting masks
TAIWAN SEMICONDUCTOR MFG9 citations73
US6251547B1Jun 26, 2001
Simplified process for making an outrigger type phase shift mask
TAIWAN SEMICONDUCTOR MFG12 citations73
US6261725B1Jul 17, 2001
Phase angle modulation of PSM by chemical treatment method
TAIWAN SEMICONDUCTOR MFG8 citations72
US7037628B2May 2, 2006
Method of a floating pattern loading system in mask dry-etching critical dimension control
TAIWAN SEMICONDUCTOR MFG1 citations45