Inventor

SCHADE MICHAEL J

US3 patents

Patents

3 patents

US6493078B1Dec 10, 2002

Method and apparatus to improve coating quality

IBM15 citations82

US6237393B1May 29, 2001

Wafer center alignment device and method of wafer alignment

IBM18 citations78

US7967978B2Jun 28, 2011

Method and apparatus for filter conditioning

IBM7 citations75