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Inventor
APPELBAUM AMI
US
3 patents
⚠️ This page may combine multiple inventors who share the name “APPELBAUM AMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
1 patent
US7578650B2
Aug 25, 2009
Quick swap load port
KLA TENCOR TECH CORP
39 citations
87
ROCKWELL INTERNATIONAL CORP
1 patent
US4994142A
Feb 19, 1991
Eliminating undercutting of mask material when etching semiconductor topography by native oxide removal
ROCKWELL INTERNATIONAL CORP
9 citations
68
KLA TENCOR CORP
1 patent
US11569138B2
Jan 31, 2023
System and method for monitoring parameters of a semiconductor factory automation system
KLA TENCOR CORP
3 citations
63