Inventor
TING CHRIS
TW3 patents
Patents
3 patentsUS6399508B1Jun 4, 2002
Method for metal etch using a dielectric hard mask
APPLIED MATERIALS INC22 citations89
US6309977B1Oct 30, 2001
Method for the etchback of a conductive material
APPLIED MATERIALS INC20 citations89
US6548415B2Apr 15, 2003
Method for the etchback of a conductive material
APPLIED MATERIALS INC4 citations59