Inventor

ROLFSON J BRETT

US148 patents

⚠️ This page may combine multiple inventors who share the name “ROLFSON J BRETT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ROLFSON J BRETT

MICRON TECHNOLOGY INC

Integrated capacitor bottom electrode for use with conformal dielectric

Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology

Method of selectively etching silicon dioxide dielectric layers on semiconductor wafers

Spacers for field emission display fabricated via self-aligned high energy ablation

Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology

Method to form high aspect ratio supports (spacers) for field emission display using micro-saw technology

Method to form self-aligned gate structures and focus rings

Method for depositing doped amorphous or polycrystalline silicon on a substrate

Method for depositing polysilicon with discontinuous grain boundaries

Field emission structures produced on macro-grain polysilicon substrates

Multi-layer, attenuated phase-shifting mask

Integrated capacitor bottom electrode for use with conformal dielectric

Method for removing contaminants from a semiconductor wafer

Ultraviolet light reflectance method for evaluating the surface characteristics of opaque materials

Atom lithographic mask having diffraction grating aligned with primary mask pattern

Method of phase shift lithography

Method of phase shift mask fabrication comprising a tapered edge and phase conflict resolution

Method to form self-aligned gate structures and focus rings

Phase shifting mask

Method of making a resistor

Method of making masks for phase shifting lithography to avoid phase conflicts

Field emission structures produced on macro-grain polysilicon substrates

Method to form self-aligned gate structures and focus rings

Method of fabricating phase shift reticles

Method of fabricating phase shifting reticles with an accurate phase shift layer

Method and apparatus for facilitating removal of material from the backside of wafers via a plasma etch

Multi-layer, attenuated phase-shifting mask

Integrated capacitor bottom electrode for use with conformal dielectric

Method for removing contaminants from a semiconductor wafer

Methods of determining processing alignment in the forming of phase shift regions

Method for removing contaminants from a semiconductor wafer

Method of forming a phase shifting reticle

Field emission display with plural dielectric layers

Method of patterning substrates using multilayer resist processing

Integrated circuit, and method for forming an integrated circuit

Field isolation structure formed using ozone oxidation and tapering

Method of making a resistor, method of making a diode, and SRAM circuitry and other integrated circuitry

Method for reducing gaseous species of contamination in wet processes

Insulative barrier useful in field emission displays for reducing surface leakage

Method of forming opaque border on semiconductor photomask

Method for making multi-phase, phase shifting masks

Method for forming an improved field isolation structure using ozone enhanced oxidation and tapering

Method of making substractive rim phase shifting masks

Process for selectively etching integrated circuit devices having deep trenches or troughs or elevated features with re-entrant profiles

Removable bandpass filter for microlithographic aligners

Process for etching a semiconductor device using an improved protective etching mask

MICRON DISPLAY TECH INC

Method for formation of a trench accessible cold-cathode field emission device

Field emission display and method of making same

MICRON SEMICONDUCTOR INC

Method of making masks for phase shifting lithography

(unassigned)

Method of chromeless phase shift mask fabrication suitable for auto-cad layout