Inventor

NOZAWA YOSHIYUKI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “NOZAWA YOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YAMAMOTO TAKASHI

1 patent

US8518283B2Aug 27, 2013

Plasma etching method capable of detecting end point and plasma etching device therefor

YAMAMOTO TAKASHI7 citations82

SUMITOMO PRECISION PROD CO

1 patent

US7220678B2May 22, 2007

Method for etching of a silicon substrate and etching apparatus

SUMITOMO PRECISION PROD CO5 citations57

NOZAWA YOSHIYUKI

1 patent

US8546265B2Oct 1, 2013

Method, apparatus and program for manufacturing silicon structure

NOZAWA YOSHIYUKI0 citations31

IKEMOTO NAOYA

1 patent

US8628676B2Jan 14, 2014

Plasma etching method

IKEMOTO NAOYA0 citations28