Inventor
SIFNATSCH GUENTER
US6 patents
⚠️ This page may combine multiple inventors who share the name “SIFNATSCH GUENTER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
5 patentsUS7693687B2Apr 6, 2010
Controller and method to mediate data collection from smart sensors for fab applications
MKS INSTR INC23 citations91
US7146237B2Dec 5, 2006
Controller and method to mediate data collection from smart sensors for fab applications
MKS INSTR INC39 citations91
US6993404B2Jan 31, 2006
Graphical user interface with process quality indicator
MKS INSTR INC36 citations91
US7219255B2May 15, 2007
Failsafe switching of intelligent controller method and device
MKS INSTR INC17 citations79
US7787477B2Aug 31, 2010
Address-transparent device and method
MKS INSTR INC3 citations60