Inventor

MCDONOUGH KELLY A

US2 patents

⚠️ This page may combine multiple inventors who share the name “MCDONOUGH KELLY A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PAMARTHY SHARMA

1 patent

US8475625B2Jul 2, 2013

Apparatus for etching high aspect ratio features

PAMARTHY SHARMA15 citations73

APPLIED MATERIALS INC

1 patent

US7718029B2May 18, 2010

Self-passivating plasma resistant material for joining chamber components

APPLIED MATERIALS INC6 citations58